Plasma Discharge Systems and Vacuum Technologies

FEMTOTEKNIK ENGINEERING

PLASMA SYSTEMS

Plasma Immersion Ion Implantation System 

Plasma Sputtering Sources  

ICP Sources for Deep RIE Applications

Sputtering Packages   

Components Microwave Generators and Components

Generators: 300 W, 1.2 kW, 2 kW, 6 kW, Circulators Tuners  Directional Couplers  Microwave Leak detectors,  etc

 

Delta Glow Integrated Rf Plasma Sources

Ion Source

RF  and High Voltage Feedthrough