Plasma Discharge Systems and Vacuum Technologies FEMTOTEKNIK ENGINEERING PLASMA SYSTEMS Plasma Immersion Ion Implantation System Vertical PECVD Systems Plasma and Ion Sources Vacuum Systems Plasma Immersion Ion Implantation System Plasma Sputtering Sources ICP Sources for Deep RIE Applications Sputtering Packages Components Microwave Generators and Components Generators: 300 W, 1.2 kW, 2 kW, 6 kW, Circulators Tuners Directional Couplers Microwave Leak detectors, etc Delta Glow Integrated Rf Plasma Sources Ion Source RF and High Voltage Feedthrough